IVWorks

IVWorks, an innovative start-up company that utilizes Hybrid-MBE technology to produce high-quality GaN epi-wafers, has developed a machine learning-based artificial intelligence (AI) epitaxy system "DommTM", dramatically improving the productivity and scalability. Hybrid-MBE growth is performed with a hybrid nitrogen source of ammonia and plasma for optimal quality and high growth rate. In addition, DommTM, the IVWorks' AI technology, uses a deep learning algorithm to detect and analyze reflection high energy electron diffraction (RHEED) patterns, which can monitor crystal growth at the atomic level during MBE growth in real-time. Furthermore, a prediction model is created by learning the validity and correlation of the dataset that integrates classified RHEED patterns, growth conditions, and quality results of the epiwafers. This prediction model can be applied to epiwafer manufacturing to maximize productivity.